Comparison measurements of low-pressure between a laser refractometer and ultrasonic manometer
نویسندگان
چکیده
منابع مشابه
Comparison measurements of low-pressure between a laser refractometer and ultrasonic manometer.
We have developed a new low-pressure sensor which is based on the measurement of (nitrogen) gas refractivity inside a Fabry-Perot cavity. We compare pressure determinations via this laser refractometer to that of well-established ultrasonic manometers throughout the range 100 Pa to 180 000 Pa. The refractometer demonstrates 10(-6) ⋅ p reproducibility for p > 100 Pa, and this precision outperfor...
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ژورنال
عنوان ژورنال: Review of Scientific Instruments
سال: 2016
ISSN: 0034-6748,1089-7623
DOI: 10.1063/1.4949504